Introduction to W-Seal and C-Seal

03/01/2024
2342

Introduction to W-Seal and C-Seal

 

Integrated Gas Systems (IGS) used in semiconductor equipment typically consist of components such as diaphragm valves, check valves, regulators, filters, pressure sensors, mass flow controllers, and substrates. These components are usually surface-mounted and are sealed using either W-seal or C-seal. The choice of sealing type is crucial in determining the system’s sealing performance. In this Tech Talk, we will discuss the similarities and differences between W-seal and C-seal.

 

Similarities between W-Seal and C-Seal

 

 

W-seal and C-seal are both types of metal seals. Unlike non-metal seals like rubber or composite, metal seals do not deteriorate over time due to compacting, and they have good chemical compatibility. FITOK W-seal gaskets (IWG series) and C-seal gaskets (ICG series) are made of 316L or 316L VAR stainless steel in accordance with FITOK Ultra High Purity Process (FC-03). These gaskets are electro-polished to reach a surface roughness of Ra ≤ 5 μin. (0.13 μm), which conforms to SEMI F19 UHP. With excellent sealing performance, their sealing face leak rate (helium) ≤ 1×10-9 std cm3/s.

 

Compared to weld seal or metal gasket face seal, W-seal and C-seal are more compact and can significantly reduce the size of gas delivery systems. For occasions requiring limited flow, sealing gaskets with specified orifice are available.

 

Differences between W-Seal and C-Seal

 

 

W-seal gaskets (IWG series) are designed with a "floating" structure, enabling the sealing face to be independent of components receiving external forces. During installation, the sealing face of the gasket compresses against the surface-mounted components (like W-seal valve body) and substrates and forms the seal. Each W-seal can be installed in the system individually, making it easy to remove and reinstall as system layouts are modified. In addition, FITOK service kit (Model No.: SC-IGS-11) offers gasket tweezers for W-seal gaskets to ensure a quality installation of the gasket.

 

W-Seal

 

The section of a C-seal gasket (ICG series) resembles the letter "C" with two flat sealing bosses on both sides. When properly tightened, the top and bottom of the gasket smash against the surface-mounted components (like C-seal valve body) and the hardened sealing faces of substrates and create seals. In addition, the C-seal gasket bracket can help to locate multiple gaskets at one time.

 

C-Seal

 

For any Integrated Gas System (IGS), either W-seal or C-seal can fulfill requirements. However, due to different SEMI standards applied, sealing gaskets and sealing faces vary in construction. Customers can choose a W-seal or C-seal based on usage habits and component sealing types.

 

Related Articles:

This website uses cookies in order to improve your user experience. By clicking "Accept" or continuing to use our website, you consent to our use of cookies as defined in this Cookie Policy.

fitokgroup.com Cookie Notice and Disclosure

Last updated June 16, 2020

FITOK USE OF COOKIES AND SIMILAR TECHNOLOGY

Like many companies, FITOK Group, its subsidiaries and its authorized sales and service centers (collectively, "FITOK" or "we, " "us, " or "our") use "cookies" and similar tools on fitokgroup.com and any authorized sales and service center website (collectively, the "Sites") to facilitate and improve your online experience. This Notice explains how we do that.  
What are cookies?
A cookie is a small file or piece of information which is downloaded to your computer or device when you visit the Sites, and then sent back to the Sites in order to allow us to recognize your computer or device later. Although certain cookies may contain personal data – for example, if you click to "remember me" when logging in, a cookie may store your username – most cookies won’t collect personal data that identifies you. Rather, most cookies collect general information, such as how users arrive at and use the Sites, or a user’s general location. By collecting this information, cookies help to analyze web traffic and allow web applications to respond to you as an individual. The web application can tailor its operations to your needs, likes and dislikes by gathering and remembering information about your preferences.
How do we use cookies?
Our Sites utilize cookies for several purposes, including the storage of information required to determine how to properly deliver content to your computer or device. A cookie is provided to all visitors to fitokgroup.com, regardless of whether you register with an authorized sales and service center.
For users who do register with an authorized sales and service center, a profile containing the registration information is generated by our website, and used for several purposes:
  1. to match you with content that is associated with your interests and to direct you to additional resources and tools that can save you time;
  2. to enable a fast response for service or follow-up request from our website;
  3. to verify your identity;
  4. to send you an electronic newsletter, other information and content; and
  5. to contact you when necessary.
What kinds of cookies do we use?
We may use cookies for a number of purposes:
  1. Session Cookies These cookies are used 'in-session' each time you visit and then expire when you leave a Site or shortly thereafter.  They are not stored on your computer or device permanently, do not contain any personal data and help by minimizing the need to transfer personal data across the internet. These cookies can be deleted or you can refuse to allow their use, but this will hamper the performance and your experience in using the Sites. These cookies also take time stamps that record when you access the Sites and when you leave the Sites.
  2. Tracking Cookies – These cookies enable us to recognize repeat visitors to the Sites. By matching an anonymous, randomly generated identifier, a tracking cookie keeps track of where a user of the Sites came from, what search engine they may have used, what link they clicked on, what keyword they used and where they were in the world when they accessed the Sites. By monitoring this data, we can make improvements to the Sites.
  3. Persistent Cookies – This type of cookie is saved on your computer or device for a fixed period (sometimes for a few hours, sometimes for a year or longer) and is not deleted when the browser is closed. Persistent cookies are used where we need to remember who you are for more than one browsing session. For example, this type of cookie can be used to store your preferences, so that they are remembered for the next visit to the Sites.
  4. Performance or Analytical Cookies Performance cookies are used to analyze how the Sites are used and to monitor their performance, which allows us to improve your experience in using the Sites. These cookies help us to tailor the content of the Sites to reflect what the Site users find most interesting and to identify when technical issues with the Sites arise. We may also use this data to compile reports to help us to analyze how Sites are used, what the most common issues are and how we can improve the Sites.
Can the Cookies be blocked?
Yes. Most internet browsers are initially set up to automatically accept cookies. You can, however, change your browser settings to block cookies or to alert you when cookies are being sent to your device. There are a number of ways to manage cookies. Please refer to your browser instructions or help screen to learn more about how to adjust or modify your browser settings. Instructions for blocking or allowing cookies in popular web browsing software can be found by clicking the following links:
Internet Explorer
Firefox
Google Chrome
Microsoft Edge
Safari
AboutCookies.org 
Please be aware that if you disable the cookies that we use, this may impact your experience while on the Sites. For example, some features and services on the Sites may not work properly because we may not be able to recognize and associate you with your FITOK account(s). In addition, the offers we provide when you visit us may not be as relevant to you or tailored to your interests.