New Product Launch: FITOK Two-Step Pneumatic Diaphragm Valves

08/21/2023

2165

Two-Step Pneumatic Diaphragm Valves

Introduction

FITOK DPT Series Two-Step Pneumatic Diaphragm Valves are used in semiconductor industry to provide rapid switching between low-flow and high-flow modes to relieve pressure rise in the cavity and prevent fluid from flowing rapidly into the cavity and other internal areas of the semiconductor processing machine, thus keeping particles from flying around and contaminating the cavity. Two-Step pneumatic diaphragm valves are more space and cost efficient than the traditional method of regulating pressure by adding bypass pipeline.

Features

Fast switching between low and high flow rates
Cobalt alloy diaphragm with high strength and corrosion resistance to ensure long cycle life
Minimum particle generation and dead space
Internally threadless and springless

Technical Data


Valve Body Material		316L, 316L VAR
Valve Seat Material		PFA, PCTFE
Port Size		1/4"
Flow Coefficient (Cv)		High-Flow (HF) Port: 0.27 Low-Flow (LF) Port: 0.02 ~ 0.12
Orifice Size		0.16 in. (4.1 mm)
Working Pressure		Vacuum to 145 psig (10 bar)
Working Temperature		PFA: 14 ~ 302 °F (-10 ~ 150 °C) PCTFE: 14 ~ 176 °F (-10 ~ 80 °C)
Wetted Surface Roughness		Ra 5 μin. (0.13 μm)
Leak Rate (Helium)	Internal	≤ 1×10^-9 std cm³/s
	External	≤ 1×10^-9 std cm³/s

Please see the Two-Step Pneumatic Diaphragm Valves Catalog for more information. Should you have any questions, please contact us directly and We will reach you soon.

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