Back New Product Launch: FITOK Gas Stick Assemblies
FITOK gas stick assemblies integrate a diaphragm valve/ball valve, a pressure regulator and a pressure gauge into one stick to reduce site connections and achieve precise pressure control and fluid shutoff. FITOK gas stick assemblies, including AGH series and AGL series, are both widely used in the semiconductor industry and so on. FITOK has been adopting strict specifications for materials, cleaning and packaging processes to ensure product cleanliness.
AGH Series High Purity Gas Stick Assemblies
※ Figure shows the pressure gauge is connected with a T series tubular fitting
Features
- For high purity gas systems such as the semiconductor industry
- Integrate an ultra high purity diaphragm valve, an ultra high purity pressure gauge and an ultra high purity pressure regulator into one stick with the diaphragm valve for shut-off function
- Alloy diaphragm improves strength and corrosion resistance for long cycle life
- T series tubular fittings optional for pressure gauge connection (customized lengths available)
- FC-03 Ultra High Purity Process Specification
- 1) Assembled and tested in ISO 4 / FED-STD-209E Class 10 Cleanroom
- 2) Manufactured from high purity stainless steel, wetted surfaces electropolished to an average internal surface roughness Ra of 10 µin. (0.25 µm)
- 3) Ultra high purity cleaning with continuously monitored DI water ultrasonic cleaning system
- 4) Double bagged with vacuum sealed polyethylene dust-free inner bag (inert gas filling optional) and sealed polyethylene outer bag
Technical Data
| Parameter | Max. Inlet Pressure | 300 psig |
| Outlet Pressure | 0 ~ 25, 0 ~ 50, 0 ~ 100, 0 ~ 250 psig | |
| Working Temperature | -9.4 ~ 140 °F (-23 ~ 60 °C) | |
| Flow Coefficient (Regulator Cv) | 0.2 ~ 1.8 | |
| Size | From 1/4" to 1" optional | |
| Main Body Material | 316L SS, 316L VAR optional (pressure gauge main body material 316L SS) | |
| Main Components | Diaphragm Valves | DH Series (1/4"), DV Series (1/2"), DL Series (3/4" & 1") |
| Gauges | GP Series | |
| Regulators | RDG Series (1/4"), RDM Series (1/2"), RDH Series (3/4" & 1") | |
AGL Series General Gas Stick Assemblies
Features
- Applicable for general gas systems and oxygen-enriched environments
- Integrated from a ball valve, a regulator and a pressure gauge
- Alloy diaphragm improves strength and corrosion resistance for long cycle life
- FC-02 Special Cleaning and Packaging Process Specification
- 1) Meet the requirements of ASTM G93 Level C specifying nonvolatile residues shall not exceed 6 mg/ft2, applicable for oxygen-enriched environments
- 2) Double bagged with vacuum sealed polyethylene dust-free inner bag (inert gas filling optional) and sealed polyethylene outer bag
Technical Data
| Parameter | Max. Inlet Pressure | 500 psig |
| Outlet Pressure | 0 ~ 25, 0 ~ 50, 0 ~ 100, 0 ~ 250 psig | |
| Working Temperature | -40 ~ 140 °F (-40 ~ 60 °C) | |
| Flow Coefficient (Regulator Cv) | 0.2 ~ 1.8 | |
| Size | From 1/4" to 1" optional | |
| Main Body Material | 316 SS, 316L SS optional (pressure gauge main body material 316 SS) | |
| Main Components | Ball Valves | BO Series |
| Gauges | GC Series | |
| Regulators | RDG Series (1/4"), RDM Series (1/2"), RDH Series (3/4" & 1") | |
Please see the Gas Stick Assemblies Catalog for more information. Should you have any questions, please contact us directly and We will reach you soon.
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