New Product Launch: FITOK Ultra High Purity Filters
Introduction
FITOK FP Series Ultra High Purity Filters feature a removal rating of 0.003 μm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for filtering gases in various semiconductor manufacturing processes such as CVD, PVD, and dry etching.
Features
- Particle removal rating of ≥ 0.003 μm, with a filter efficiency greater than 99.9999999% at maximum flow rate
- Excellent chemical compatibility
- 100% helium leak tested
Technical Data
Material | Filter Element | PTFE | |||
Support | PFA | ||||
Housing | 316L SS or 316L VAR | ||||
Removal Rating | ≥ 0.003 μm | ||||
Filter Efficiency (Log Reduction Value) | > 99.9999999% (9LRV) | ||||
Helium Leak Rate | < 1×10-9 std cm3/s | ||||
Recommended Work Flow Rate | 0~60 slpm (0~2.1 scfm) |
0~120 slpm (0~4.2 scfm) |
0~500 slpm (0~17.7 scfm) |
0~1000 slpm (0~35.3 scfm) |
|
Max. Working Pressure | 3000 psig ((207 bar)) | 1000 psig ((68.9 bar)) | |||
Max. Positive Differential Pressure | 58 psig (4 bar) @ 23 °C | 87 psig (6 bar) @ 23 °C | |||
Max. Negative Differential Pressure | 10 psig (0.7 bar) @ 23 °C | 44 psig (3 bar) @ 23 °C | |||
Max. Working Temperature | -22 ~ 248 °F (-30 ~ 120 °C) |
In addition to FP Series Ultra High Purity Filters, FITOK offers other types of diaphragm valves (DQ, DP, DH, DM, DS, DR, DV, DL, DF, DE, DK, and ALD series), Vacuum Generators (VGB, VGM, VGC Series), High Purity Ball Valves (BGP, BHP, BDP, BRP series), High Purity Tubing (TBA, TEP, PEP and TCA series),Regulators (RDGC, RTGC, RDCC, RTCC series), and more. These products are tailored to meet the exacting demands of fluid system components across industries, such as semiconductor manufacturing.
Please see the FP Series Ultra High Purity Filters Catalog for more information. Should you have any questions, please contact us directly and we will reach you soon.
Related Articles: